| abstract |
A microbolometer is disclosed, including a bottom multilayered dielectric (510), having a first silicon oxynitride layer (514) and a second silicon oxynitride layer (516) disposed above the first silicon oxynitride layer (514), the first (514) and second (516) silicon oxynitride layers having different refractive indices. The microbolometer further includes a detector layer (520) disposed above the bottom multilayered dielectric (510), the detector layer (520) comprised of a temperature sensitive resistive material, and a top dielectric (530) disposed above the detector layer (520). |