http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012169971-A1

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publicationDate 2012-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2012169971-A1
titleOfInvention Method of generating a metamaterial, and a metamaterial generated thereof
abstract A method of generating a metamaterial operable in the visible-infrared range is provided. The method comprises a) depositing a layer of a conductive material on a substrate; b) forming a layer of electron beam resist on the layer of conductive material; c) patterning the layer of electron beam resist using electron beam lithography to form a patterned substrate; d) depositing a layer of a noble metal on the patterned substrate; and e) removing the resist. A metamaterial operable in the visible-infrared range comprising split-ring resonators having a least line width of about 20 nm to about 40 nm on a substrate is provided. A transparent photonic device or a sensor for chemical or biological sensing comprising the metamaterial is also provided.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014184530-A1
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