http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012167195-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94a50808b6cc57187b1eaf9c6dd9061f http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e6e225e35195c1dabec8d180a6cce557 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3721d42d63d02253af7d7aea0c081814 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45557 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2012-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69772378b054f47c8814983bb865ca37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_417eebe400e7b3d5aacd065b36df48e7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f25d28c57618be05a1450531d7fea591 |
| publicationDate | 2012-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2012167195-A2 |
| titleOfInvention | Chamber exhaust in-situ cleaning for processing apparatuses |
| abstract | Apparatuses and systems are disclosed for exhausting by-products from a processing chamber. In an embodiment, a dual exhaust system for removing by-products from a processing chamber includes a first exhaust line and a second exhaust line with each line having a pressure control valve and a particle trap for removing by-products. A portion of the first exhaust line may be coupled in parallel with the second exhaust line. The second exhaust line can be isolated from the first exhaust line and cleaned while the first exhaust line is removing by-products from the processing chamber or vice versa. In one embodiment, an exhaust system for removing by-products from a processing chamber includes an exhaust line and valves for removing the by-products. The valves are designed to operate at a high temperature such that the heated by-products are in a vapor phase while being removed through the exhaust line. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160051622-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101894438-B1 |
| priorityDate | 2011-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.