| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5bc5292a07e34d16eb1d033a16d3aec3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3f7a728ab2fa774820e9d31be44731ca |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q80-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0176
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q20-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q10-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0188 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2012-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18544bd6732aef8925a0e356aa495a4d |
| publicationDate |
2012-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012162271-A2 |
| titleOfInvention |
Method and system for manufacture of a electronic devices based on localized deposition of precursor gases |
| abstract |
A method of fabricating an integrated circuit includes forming (52) a metallic trace over a substrate. Resonance in the metallic trace can be induced (54), resulting in a resonating metallic trace and a localized heated target deposition region. A semiconductor material can be deposited on the target deposition region via gas decomposition (56) of a semiconductor precursor gas. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018046034-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11668672-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102016010764-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110050187-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110050187-A |
| priorityDate |
2011-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |