| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7e7a6b12cb745c6045f3568b27b4fe45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b63714df1794256b67cfe380c0e0a40e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ba54db1bfe2fae432fc2791a738cba4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_76ba102ea9c02b6633d64bf09c5b89a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6607fbbe234c08e0171b474126c78ebf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_78a72f3ed7837b6d7b27acb64149e34a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
2012-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a091329f023fd3c53e9f10104fbfbb77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b792057bbec60c2ab3ebbb108b1285d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30c45287b3af4d604e2877ea1b2f8378
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf721599965efcb3960709e9081a1deb |
| publicationDate |
2012-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012135342-A1 |
| titleOfInvention |
Chemical mechanical polishing of group iii-nitride surfaces |
| abstract |
A method of chemically-mechanically polishing a substrate having a Group Ill-nitride surface includes providing a chemical-mechanical polishing slurry composition. The slurry composition includes a slurry solution including a liquid carrier and an oxidizer including a transition metal or a per-based compound. The slurry solution includes at least one component that reacts with the Group Ill-nitride surface to form a softened Group Ill-nitride surface. The Group Ill-nitride comprising surface is contacted with the slurry composition by a pad to form the softened Group Ill-nitride surface. The pad is moved relative to the softened Group Ill-nitride surface, wherein at least a portion of the softened Group Ill-nitride surface is removed. |
| priorityDate |
2011-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |