| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eff639fb6bee48527491db69a8f25b5b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d4a9755b1e4398a657f723f21b69782
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f83515617474935180d38c7f5aeff623 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-3842
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2012-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d3e7f05491bf6da76e4092638c7353b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2d00add322226c26907431546de8456
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72d30bde0fbf2e5f0fe7b148f06cd1b3 |
| publicationDate |
2012-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012133956-A1 |
| titleOfInvention |
Method for producing molds |
| abstract |
[Objective] To enable improvements in throughput in production of molds having deposited films as mold release layers. [Constitution] In production of a mold 1 having a deposited film on the surface thereof as a mold release layer (14), a quartz substrate (10) is plasma etched employing an etching gas that includes a sedimentary gas (5a)/(5b) to form a pattern of protrusions and recesses having a desired shape in a structure constituted by the quartz substrate (10) and a mask layer (M), while a deposited film constituted by sediment of the sedimentary gas (5a)/(5b) is formed along the pattern of protrusions and recesses. |
| priorityDate |
2011-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |