| abstract |
A hard-film-coated member which comprises a base constituted of a superhard alloy or a high-speed steel and a titanium carbonitride layer formed on the base by chemical vapor deposition, the titanium carbonitride layer having a columnar crystal structure and comprising first to third layers in this order from the base side (the carbon concentration of the second layer is lower than the carbon concentration of the first layer, and the carbon concentration of the third layer is lower than the carbon concentration of the second layer); and a bit-exchangeable rotary tool which includes the member. The first layer is formed using feed gases which comprise TiCl 4 gas, N 2 gas, a C 2-5 hydrocarbon gas, and H 2 gas. The second layer is formed using feed gases which comprise TiCl 4 gas, N 2 gas, an organic cyanide gas, a C 2-5 hydrocarbon gas, and H 2 gas. The third layer is formed using feed gases which comprise TiCl 4 gas, N 2 gas, an organic cyanide gas, and H 2 gas and in which the content of the organic cyanide gas is less than that for the second layer. |