| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_42f6bd93eefe0b750cb1c7db0335fa32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e97014be1435a411a26b43ddd2f0ee8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c95659b2f89ce5bb8f97fe754382c50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aef200f1f84b1cf9e2ba6a02075c2eba |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 |
| filingDate |
2012-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa0613072c5cd4aaf339c5d740553930
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b1f5b3e30c8212500a349c8f0d05ffe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fdb22b1ed6ddb249ce4f8a9ba195ffd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11dd9225e614bd77f3821627b8b5d121 |
| publicationDate |
2012-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012124524-A1 |
| titleOfInvention |
Vapor deposition particle projection device and vapor deposition device |
| abstract |
This vapor deposition particle projection device (20) is provided with: a crucible (22); a holder (21) having at least one projection opening (21a); and plate-shaped members (23-25) provided within the holder (21). The plate-shaped members (23-25) have openings (23a-25a) provided corresponding to the projection opening (21a), and the plate-shaped members (23-25) are provided spaced from each other in the direction perpendicular to the plane of the openings. The projection opening (21a) and the openings (23a-25a) each overlap in a plan view. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017026357-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017051790-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017026357-A1 |
| priorityDate |
2011-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |