| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c95659b2f89ce5bb8f97fe754382c50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aef200f1f84b1cf9e2ba6a02075c2eba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_42f6bd93eefe0b750cb1c7db0335fa32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e97014be1435a411a26b43ddd2f0ee8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 |
| filingDate |
2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11dd9225e614bd77f3821627b8b5d121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fdb22b1ed6ddb249ce4f8a9ba195ffd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b1f5b3e30c8212500a349c8f0d05ffe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa0613072c5cd4aaf339c5d740553930 |
| publicationDate |
2012-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012090777-A1 |
| titleOfInvention |
Deposition method, deposition film, and method for producing organic electroluminescence display device |
| abstract |
This deposition method involves a preparation step for preparing a mask unit in which the relative position of a shadow mask (81) and a deposition source (85) is secured, a deposition step for depositing a deposition flow ejected from the deposition source (85) onto a deposition area (210) by relatively moving the mask unit and/or a substrate (200) to be formed with a film, and a shutter position adjusting step for adjusting the position of a second shutter (111) so as to shield the deposition flow flowing into an area (210) in which deposition is not needed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10596582-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10196737-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014031581-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9724715-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018096659-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9893283-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015137390-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022006051-A1 |
| priorityDate |
2010-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |