| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aef200f1f84b1cf9e2ba6a02075c2eba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e97014be1435a411a26b43ddd2f0ee8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c95659b2f89ce5bb8f97fe754382c50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_42f6bd93eefe0b750cb1c7db0335fa32 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45578
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate |
2011-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa0613072c5cd4aaf339c5d740553930
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11dd9225e614bd77f3821627b8b5d121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b1f5b3e30c8212500a349c8f0d05ffe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fdb22b1ed6ddb249ce4f8a9ba195ffd |
| publicationDate |
2012-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012086568-A1 |
| titleOfInvention |
Vapor deposition device, vapor deposition method, and method of manufacturing organic electroluminescent display device |
| abstract |
The disclosed vapor deposition device (50) forms a film on a substrate (60) on which a film is to be formed, and is provided with a vapor deposition source (80) having injection ports (81) for injecting vapor deposition particles, a vapor deposition source crucible (82) for supplying vapor deposition particles to the vapor deposition source (80), and a rotation motor (86) which by rotating the vapor deposition source (80) changes the distribution of the amount of vapor deposition particles ejected. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017500446-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102994958-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017115246-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11015244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015024538-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015184290-A1 |
| priorityDate |
2010-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |