| abstract |
A workpiece (13) comprises a base element (1), optionally a bonding layer (2) and/or a plurality of intermediate layers (3, 4, 30, 40, 5) and an Si-DLC-containing covering layer (6) having a hydrogen content of from 5 to 20 atom%. A process for the PVD coating of workpieces comprises one or more steps S 1 to S N , where N = 1, 2, 3, where, in step S N , an Si-DLC-containing covering layer is deposited by means of one or more magnetron cathodes having a silicon-containing target and optionally one or more magnetron cathodes having a graphite target in an atmosphere having a nominal hydrogen content of less than 30 atom%. |