| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2410f2620cbb1f8d5cade6b1c2d0e38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4324fc6d674c0818ffddb08da5bc35aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0a0796312011566a0bebed22b65294b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_42b54b91f2b4535ac1e236776e07d5d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d69445b2bef2798628ddc9a3f83d0174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bbf4ead1ae9273c030b07c3cd8e8cdfb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f89bd8f6e1eee4daa46e9c33f1bd3ac |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q40-00 |
| filingDate |
2011-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d4851793b78c51d6fa0000863f09eab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e635ff8bcec86fdad32cd00ed10892bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29f600100d40ae10595b96e24f333adc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e23443d7300e10b3fefca488fdf2f8c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34d9dea43fdd9f5f220411406d9554c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2181e20c12f6b7cc483cb92e28df703 |
| publicationDate |
2012-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012064193-A1 |
| titleOfInvention |
Method for determining a spring constant for a deformable scanning probe microscope element, and scanning probe microscope and calibration device arranged for determining a spring constant for a probe element |
| abstract |
A method for determining a spring constant k for a deformable probe element (102) of a scanning probe microscope SPM (100). The probe (102) has an outer surface area consisting of a tip area (112) on a first probe side (108) and a tip-less area (113). The probe (102) also has a probe electrode (114) and a scanning probe tip (104) in the tip area (112). The method comprises: providing an actuation electrode (116) that is spatially separated from the probe (102); adjusting a potential difference V applied between the probe electrode (114) and the actuation electrode (116);deflecting the probe (102) into a contacted state of the actuation electrode (116) with only a contact portion of the tip-less probe area (113);measuring an EPI-potential difference Vpi between probe electrode (114) and actuation electrode (116), and deriving the spring constant k, based on the EPI-potential difference Vpi. Furthermore, an SPM (100) and calibration device with this method functionality are provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/NL-2009014-C2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3663775-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11592460-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014041331-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020117056-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10900878-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112818494-A |
| priorityDate |
2010-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |