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publicationDate 2012-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2012057467-A2
titleOfInvention Copper-containing etchant composition for a metal layer, and etching method using same
abstract Provided are a copper-containing etchant composition for a metal layer, which is used for semiconductor devices, and an etching method using same. An etchant composition including fluoboric acid enables copper-containing multilayers to be etched together without damage to a glass substrate, thus improving the yield of semiconductor devices.
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