| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ef984517ad4fa88458ab2a9b88ab9961
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_56f5246ff1a33a30640c611d3dacd1ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9a19ad38cfdacadbb4072a9a3ad2f494
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6e52c335190cfd0277a27e7391f4918b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0289
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-2632 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-1702 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-27 |
| filingDate |
2011-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fe66cd3edd8ec0e08020dae7944cf85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e762640d33a77d78b1b6f2865ea98536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23509f7b08060fdd9da52bd5acf19619 |
| publicationDate |
2012-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012052193-A1 |
| titleOfInvention |
Optoacoustic inspection device for inspection of semiconductor wafers |
| abstract |
An inspection device is provided which comprises a receiving member defining an open cell for receiving a target therein. An optical excitation input is in optical communication with the cell for exciting the target. At least one acoustic pickup is in acoustic communication with the cell for picking up acoustic energy resultant from excitation of the target. A recorder is provided for recording the acoustic energy picked up from the at least one acoustic pickup for facilitating structural analysis of the target. |
| priorityDate |
2010-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |