| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f740dd50a450e97a1b64bb8257716a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23cfd22189ff9273cc283cd6a245e9ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_16d7f610531dbae77bcb2e95d91a071b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_53aa55a21558e204846b6fc9801e0aab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1112ca149399d55c6bf5569bfc11f1f6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2232 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61N5-06 |
| filingDate |
2011-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54003b8e96a5469fd6cf7db042103e04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea78805e8127037862888d8ea27e21a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7672bb6cda0d688bc14500e85dc1cd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ca3a7bca351b3fabf1c03c4f4d1e423 |
| publicationDate |
2012-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012050685-A1 |
| titleOfInvention |
Method for lpp drive laser output during euv non-output periods |
| abstract |
A device is disclosed, herein which may comprise a droplet generator producing droplets of target material; a sensor providing an. intercept time signal when a droplet reaches a preselected location; a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from the. intercept time signal; a. laser source responsive to a trigger signal to produce a laser pulse-; and a system controlling said delay circuit to provide a. trigger signal delayed from the intercept time by a first delay time to generate a light pulse that is focused on a droplet and a trigger signal delayed from the intercept time by a second delay time to generate a light -pulse which is not focused on a droplet. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018185523-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9016881-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8847182-B2 |
| priorityDate |
2010-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |