http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012015277-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_caeaf62b05ad0cd0148cc658bb1cbaa3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae372ddaa494f2face39592b0429cc16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d02b806b4b8dce5685b9a8bf32f0a923 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y20-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 |
| filingDate | 2011-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a184702c9ed787e1676b1548ac7121eb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3e66a3871c96694279ac79b40d8aeb1 |
| publicationDate | 2012-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2012015277-A2 |
| titleOfInvention | Micro/nano combined structure, manufacturing method of micro/nano combined structure, and manufacturing method of an optical device having a micro/nano combined structure integrated therewith |
| abstract | The present invention relates to a micro/nano combined structure, a manufacturing method of a micro/nano combined structure, and a manufacturing method of an optical device having a micro/nano combined structure integrated therewith, the method comprising the steps of: forming a micro structure on a substrate; depositing a metal thin film on the substrate on which the micro structure is formed; heat treating and transforming the metal thin film into metal particles; and using the metal particles as a mask in order to form a non-reflective nanostructure, which has a frequency below that of light wavelengths and has a sharp wedge-shaped end, on the top surface of the substrate on which the micro structure is formed, and etching the front surface of the substrate on which the micro structure is formed, wherein the manufacturing process is simple, light reflectivity that occurs by means of a difference in refractive indices of air and semiconductor material can be minimized, and the method can easily be applied to the optical device field. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102683439-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103035806-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103043596-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I459553-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111016521-A |
| priorityDate | 2010-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.