| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cd80466abd1df92ff6721cf6f1134003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb6285096fec1893fb884495c9b3473a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65ee3be1cb6eee16bbf7c330bcb762ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_529c18c71b03ec5ced9d5681f52399ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7424cede8801f575dbd0a18da42aea11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5cc0cbf18909c0db83b7cdbbc901bd0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bba76c890576e42cdbd4b55e7d4d4393
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9542e8719bc74427772f04def9f2154e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-45031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-32182 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-41875 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00 |
| filingDate |
2011-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e99cbc3f591de3e1252a1b5d596565ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1293feccc9eb762a3efa65ee1d80178a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_830a0e06d68e960ac50074a983e93955
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d54399bdbc3719d62d7298cc3615fd06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c03d4b7c94a050cd8784612a5607ed7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a573860cc2a43e86f16ba65d08f859d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_932bfd65f0489069fdca9b558fe068ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_680cafef6da7aa76252d56206632d55e |
| publicationDate |
2012-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2012005863-A2 |
| titleOfInvention |
Data perturbation for wafer inspection or metrology setup |
| abstract |
Various embodiments for determining parameters for wafer inspection and/or metrology are provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015525006-A |
| priorityDate |
2010-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |