http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011134631-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5fc04976575eef9fa173f1d4bb144e8d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80d52dfcddc58705cb50ea9c1e740956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-546 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 |
| filingDate | 2011-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14c4355a670f496d969fc83f04f1addb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df4da30cedecdae834f096d6a96f2dbf |
| publicationDate | 2011-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2011134631-A1 |
| titleOfInvention | Method and apparatus for coating rate measurement |
| abstract | The present invention relates to an apparatus for the differential coating rate measurement of neutral particles and ions. The apparatus is moved to the position of the substrates to be coated or to a defined reference position. The rate is determined by a suitable detector (4), e.g. a crystal oscillator. The apparatus is configured in such a manner as to make it possible to measure the total flow of ions and neutral particles, through a shielding screen (3), and to detect the neutral particles while dismissing the ions. The proportion of ions and also neutral particles in the coating-forming species can thus be measured via differential measurements. |
| priorityDate | 2010-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.