http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011114046-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d2b7a9c51a839b2134b8b30f6af4892 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ffc1640a24729f639756bbfecbd3214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28088 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-49 |
| filingDate | 2011-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_416b57c796cc405706bc38836166cf0a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df597289d7abdf9201ecf4fc0681a3e1 |
| publicationDate | 2011-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2011114046-A1 |
| titleOfInvention | Process for producing a conducting electrode |
| abstract | The present invention relates to a process for producing a conducting electrode on a substrate, comprising the following steps: a layer (213) made of a dielectric is deposited; a protective layer (214) made of the nitride of a metal M is deposited on the dielectric layer; a functionalization layer (215) made of a material comprising a chemical species E is deposited, such that the free enthalpy of formation of the nitride of this species is less, in absolute value, than the free enthalpy of formation of the nitride of the metal M of said protective layer (214) over the temperature range between 0°C and 1200°C; and the assembly comprising said protective layer (214) and said funtionalization layer (215) is annealed (218) so that the species E diffuse from the functionalization layer (215) into the protective layer (214) and the nitrogen atoms migrate from the protective layer (214) into the functionalization layer (215). |
| priorityDate | 2010-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.