http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011106072-A2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a14ef511c024661e8ef1d0a54f36377
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_006c4519aac3236d65c88559582af776
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
filingDate 2010-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32942eecba21c80e80e73ac87175ec2c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d1c315c4f93ec91365537c445d8f37a
publicationDate 2011-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2011106072-A2
titleOfInvention Use of ruthenium tetroxide as a precursor and reactant for thin film depositions
abstract Disclosed are atomic layer deposition methods using ruthenium- containing precursors to form ruthenium-containing films for use in the manufacture of semiconductor, photovoltaic, LCD-TFT, or flat panel type devices.
priorityDate 2010-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090115155-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070115146-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080066619-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129262772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419608575
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157626296
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426212463
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412457046
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5355457
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17774827
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7612
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449573737
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414004986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14689855
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129034064
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21946147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559505
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128821600
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128096360
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73975
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5460341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5460482
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID246092395
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8182
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577481
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161213
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2782436
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129500011
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558793
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416193342
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9793785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449932229
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456370357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127460394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73866866
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415875773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129211189
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127728763
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410481602
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415859836
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593577
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157276859
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID119079
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID135991507
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547026
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID142539
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2774943
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359327
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448209582
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415819562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454079962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447754490
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID164514
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578768
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID206000
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578007

Total number of triples: 87.