http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011103282-A2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a83d552a7a5b9168d523356444fee094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a14ef511c024661e8ef1d0a54f36377
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_603e04092709199dd87e1af84cb96853
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fbf7048e58f67a1e67063e95f3e95f9c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0534e551838bc80048214c5c27970d07
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
filingDate 2011-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b6a5d84fbc9cefca55f5dbb3c5b38a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd967ab7472326f674b3648bbbd50a94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_180c03a7f2cb909618252ef830564743
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eed4d0261806d4f577a0fe4c5ece7339
publicationDate 2011-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2011103282-A2
titleOfInvention VAPOR DEPOSITION METHODS OF SiCOH LOW-K FILMS
abstract Disclosed are precursors that are adapted to deposit SiCOH films with dielectric constant and Young's Modulus suitable for future generation dielectric films.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014015232-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018523917-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9822132-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9593133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013197575-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018085117-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2875166-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9371338-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9382268-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017007986-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10570513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11407922-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9938303-B2
priorityDate 2010-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7479306-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6756323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007057235-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2264219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009299086-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7030468-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6479110-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7282458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5296624-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6312793-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7288292-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7312524-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6953984-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7049427-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID327600415
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123862662
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128676691
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129956025
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID323716232
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127961649
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79646
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127908227
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8473
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID327731723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128570796
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID327750860
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76004
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127355257
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID324694422
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID323303873
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129247180
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID326580902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID324206468
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123965490
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85589
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128219813
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129919998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID323644096
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID188318
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57375577
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID326426694
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71356583
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129709786
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11229
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128716379
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127396589
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9244

Total number of triples: 94.