| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c47b251f6ed86274841699303350cdd7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_27cd498204a3ac03db9e5bfd5f8c286e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ff1fb5deccbb7d69c1f7f26b2df1b2c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1888f0f730204e82cd845cde16e3cec4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2010-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f77c7a866bdc9b298958e400e83f771d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49eba61e8b1f6f7d2f3129804d583725
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d2b3c6273946556ef396612d20fd7b9 |
| publicationDate |
2011-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011095217-A1 |
| titleOfInvention |
Method and process for metallic stamp replication for large area nanopatterns |
| abstract |
A method and process for obtaining a metal stamp from an intermediate polymer stamp comprising the steps of providing a first imprint layer on top of a first polymer layer, imprinting structures to obtain an intermediate stamp. A conductive layer is provided on top of the structures to obtain a seed layer if the imprinted polymer is a non-conductive, plating metal on top of the intermediate polymer stamp to obtain a metal stamp then separating the intermediate stamp from the metal stamp. This invention demonstrates stamp replication in high throughput and at low cost. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11131021-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3011391-B1 |
| priorityDate |
2010-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |