| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0feff4cd3d32ba6dafc75391d22fd4ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f42f9ade1df73a2804a6ca91442ebd1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1543b2b19ec0e331a0dcd89888cbef5f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-344
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| filingDate |
2010-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b13390771432b6b314e97c0026c53a57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f96b92572f63bec8ef93968aab88dcc |
| publicationDate |
2011-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011087737-A2 |
| titleOfInvention |
Polishing pad and method of making the same |
| abstract |
The disclosure is directed to polishing pads with porous polishing layers, methods of making such polishing pads, and methods of using such pads in a polishing process. The polishing pad includes a compliant layer having first and second opposing sides and a porous polishing layer disposed on the first side of the compliant layer. The porous polishing layer includes a crosslinked network comprising a thermally cured component and a radiation cured component, wherein the radiation cured component and the thermally cured component are covalently bonded in the crosslinked network. The porous polishing layer also includes polymer particles dispersed within the crosslinked network, wherein the polymer particles comprise at least one of thermoplastic polymers or thermoset polymers. The porous polishing layer typically also includes closed cell pores dispersed within the crosslinked network. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108789186-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105150120-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105150120-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101847619-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9050697-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022119586-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013142134-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108789186-B |
| priorityDate |
2009-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |