| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bbeff9e60d55ff650d8c4dcc4350e8cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e615d4ac380a7290e4cb0dfa5584b37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_56b33dc907a730cc20fd6bf47b131e30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33c922e05f6133b7d72dbb849d77487d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2009-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3294c7e752265f65dfa08cbe3aa720b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4b819cff25d15ca5d84da7a1f4d3ac4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3a1c0244716582ddc5561fbbe3cb6e4 |
| publicationDate |
2011-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011065603-A1 |
| titleOfInvention |
Photoresist stripper composition, and method of stripping photoresist using same |
| abstract |
The present invention relates to a photoresist stripper composition. More specifically, the photoresist stripper composition according to the present invention comprises a compound represented by formula 1, and has excellent photoresist stripping ability and shows excellent anti-corrosive ability with respect to a lower layer of photoresist even if the lower layer of photoresist contains molybdenum (Mo). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106062637-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106062637-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016027985-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160108109-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102009545-B1 |
| priorityDate |
2009-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |