| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c71d3b9cb994d47c51fe918291d289a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4fb06fa6269a7ab74d407541dcb2da2c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_491fdc2d1e2d145cba2611c78d64b143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d18921f411871616831386ff9f8af8c1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-2442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-0233 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-2436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01P7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01P7-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01P11-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-0076 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01P7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02 |
| filingDate |
2010-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_260c4cdeedf126e7b4e6e970ea7263f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3805a90f7d98efbceed8dbd1c8a909d2 |
| publicationDate |
2011-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011061402-A1 |
| titleOfInvention |
Bulk acoustic wave resonator and method of manufacturing thereof |
| abstract |
The invention concerns a novel bulk acoustic wave (BAW) resonator design and method of manufacturing thereof. The bulk acoustic wave resonator comprises a resonator portion, which is provided with at least one void having the form of a trench which forms a continuous closed path on the resonator portion. By manufacturing the void in the same processing step as the outer dimensions of the resonator portion, the effect of processing variations on the resonant frequency of the resonator can be reduced. By means of the invention, the accuracy of BAW resonators can be increased. |
| priorityDate |
2009-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |