| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a67d66ccc841b5907b57fe5e84feabf0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_95c89084d61fd47ae93470ca7c96f184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_63edd6af958d948a712d8804236946de |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02579
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02576
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628 |
| filingDate |
2010-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb94f812a7d4e51d7fce8ae3ee277993
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6b9f63e69758e71398f4056cc5761c5 |
| publicationDate |
2011-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011061029-A2 |
| titleOfInvention |
Silicon layers made of polymer-modified liquid silane formulations |
| abstract |
The invention relates to a formulation containing at least one silane and at least one carbon polymer in a solvent, and to the production of a silicon layer on a substrate coated with such a formulation. |
| priorityDate |
2009-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |