| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_405e3f45f3db57b28fd5db4f578fc8ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_151a54242b77ca1afef7834b12734f25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9b26723b4b3e60491b717430b7e50a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f64253ec0a75eef5b6482b819bb76563 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-494
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05C2203-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05C2203-06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M5-14586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B43-043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B43-046 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04D33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04B43-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate |
2010-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6f6650eed45ff544eb3da64f3e39aaa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ebd685ed8edef080f4933a9de29db1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f8df3441e0080c61602e38b41efcc19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11896fe286585772850dbd491efe9ea6 |
| publicationDate |
2011-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011058140-A2 |
| titleOfInvention |
Method for producing at least one deformable membrane micropump and deformable membrane micropump |
| abstract |
The invention relates to a method for producing at least one deformable membrane micropump comprising a first substrate (10) and a second substrate (20) assembled together, the first substrate (10) comprising at least one cavity (12-2) and the second substrate (20) comprising at least one deformable membrane (22-2) arranged facing said cavity (12-2). Said method comprises the following steps: said cavity (12-2) is produced in the first substrate (10), then - the first (10) and second (20) substrates are assembled together, then - said deformable membrane (22-2) is produced in the second substrate (10). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019208023-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10087923-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013160312-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10279109-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015023821-A1 |
| priorityDate |
2009-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |