http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011056892-A1
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e7593b32e6342b8b34f45960afc34ccd http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d3621d612f99a602d4b6eb96becb2dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7543d6a399aa5f0b92a5fd6e92838127 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0624 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-38 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
filingDate | 2010-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5c25b904b1009047c4e16ffbec773ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcffeef2f422ef6ef56b693be70b81da |
publicationDate | 2011-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | WO-2011056892-A1 |
titleOfInvention | Method for real-time optical diagnostics in laser ablation and laser processing of layered and structured materials |
abstract | A method for real-time optical diagnostics in laser ablation and laser processing of layered or structured materials or material structures. Diagnostics is provided during laser ablation that is utilized regularly in laser processing and/or chemical analysis of structured materials, by means of measuring optical emission generated as a result of the pulsed laser-material interaction in real time. The method can involve a single-layer -film or a stack of multiple layers or a structure of different domains. The method is particularly beneficial in fabrication of thin-film structures, such as photovoltaic and electronic devices or circuits of devices. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103240529-A |
priorityDate | 2009-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.