| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_77212be9386576ce90d2042ba67f93a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_12451a85531b2598e3d37579cb1222c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5ff284fb3a47ed06c10752da95cefd77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0c9c675ede2d6afeeab294796ff20bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bbfc44658201e59b0ed41b8cfd60e754 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02573
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-0891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2010-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eec4aa479eceacd15df37a3ca97dfbd3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28491fbe0a795ba621c3ef424253d6ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9262b34cfbc7e2c1e2a36bc37adde02d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfe45699b91bb41a6bd1be24d5262b50 |
| publicationDate |
2011-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011047114-A1 |
| titleOfInvention |
Deposition of doped zno films on polymer substrates by uv-assisted chemical vapor deposition |
| abstract |
The invention provides a method of forming a layer on a polymer substrate comprises a polymer substrate with at least one precursor, and applying ultraviolet light to decompose the at least one precursor and deposit a layer onto the polymer substrate. Also provided is a doped layer comprising zinc oxide deposited on a polymer substrate obtained by introducing at least one precursor comprising zinc and a dopant into a vessel containing a polymer substrate, and applying an ultraviolet light to decompose the at least one precursor and to deposit a layer comprising doped zinc oxide onto the polymer substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104475163-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9463999-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2610044-C2 |
| priorityDate |
2009-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |