http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011033343-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d7f8bbd0a358318ff5f2f76228f6f71 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_753b69cd0afcb8e60235551d5f907583 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60f4b1043db813f1cd5c95d9f7683e1a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f9f8c6f6d2ff67cbe53a1ed5e5cb527 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c90d4d5e5046e9ac2f76f7cf98f653b7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d13dcf9457f53f50bc186e2ee8c6830f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1229 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1295 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1279 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12 |
| filingDate | 2009-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a34e4bceff267a86120ef637f48f3bab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85c7c46aecae7f9995a6828e67b10b24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da45002f14adda2c18e15072bf7629a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c62f035005028a2b59c7a8b63caf949d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51d894f60d2e577575950cbcc3e7c998 |
| publicationDate | 2011-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2011033343-A1 |
| titleOfInvention | Method for the preparation at low temperatures of ferroelectric thin films, the ferroelectric thin films thus obtained and their applications |
| abstract | A processing technology for the fabrication at low temperatures of ferroelectric crystalline oxide thin films, among others PbZr x Ti 1-x O 3 (PZT) (<400°C for PZT) with ferroelectric properties appropriate for integration in devices is herein disclosed. The method is also valid for the fabrication of ferroelectric thin films of bronze tungsten (A 2 B 2 O 6 ), perovskite (ABO 3 ), py- rochlore (A 2 B 2 O 7 ) and bismuth-layer (Bi 4 Ti 3 O 12 ) structures, in which A and B are mono, bi-, tri-, tetra- and pentavalent ions. The method is based on the combination of Seeded Diphasic Sol Gel (SDSG) precursors with Photo Chemical Solution Deposition (PCSD) methodology and comprises the main following steps: i) synthesis of a modified metal-organic precursor solution of the desired metal oxide composition with a large photo-sensitivity in the UV wavelength range; ii) preparation by a sol gel process of nanoparticles of the desired composition, similar or dissimilar to the crystalline compound to be obtained from the previous precursor sol; iii) dispersion of the crystalline nanoparticles in the precursor sol to prepare a stable and homogeneous sol-gel based suspension; iv) deposition of the previous suspension onto substrates; v) UV irradiation in air or oxygen of the deposited layer and further thermal treatment in air or oxygen of the irradiated layer at temperatures below 400°C. This invention provides a method for the fabrication of polycrystalline ferroelectric, piezoelectric, pyroelectric and dielectric thin films, dense and without cracks with thickness above 50 nm and below 800 nm on single crystal, polycrystalline, amorphous, metallic and polymeric substrates at low temperatures and with optimised properties, being applicable in microelectronics and optics industries. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104549216-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105236480-A |
| priorityDate | 2009-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.