| abstract |
A method for purifying a crude chlorosilane containing a boron compound, which is characterized by comprising a step wherein a chlorosilane containing a boron compound is brought into contact with an ion-exchange resin and a step wherein the chlorosilane containing a boron compound is brought into contact with a silica adsorbent. It is preferable that the crude chlorosilane is brought into contact with the ion-exchange resin first, and then brought into contact with the silica adsorbent. In this connection, a silica gel is preferable as the silica absorbent, and a resin having a functional group represented by the following general formula: -CH 2 NR 1 R 2 (wherein R 1 and the like are as defined in the description) is preferable as the ion-exchange resin. |