| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_92442915a648410301484d57e78a18ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d37b873a1c3fffba3ff6547907211635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ab8b07a9585d73ac52f880e0ccaaa944
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0368c062340ea1157bb96c7d86945272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f0ba844bc75ffdb96d206d4501f9238e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-38 |
| filingDate |
2010-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3239738081681f68c817b1eb2d87062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46a3b57bdbcc8940d370765c2b5091f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8549b6a71fc85c05e5ea0154b8c19abe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c6f29d3a76fab5069b6837859bcbd91 |
| publicationDate |
2011-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011011133-A2 |
| titleOfInvention |
Cleaning device for transmission electron microscopes |
| abstract |
An apparatus for cleaning the specimen and interior specimen chamber of Transmission Electron Microscopes, and similar electron- or charged-particle-beam instruments consisting of a plasma cleaning device mounted on a hollow rod that replaces the stage through the air lock of the instrument by being the same shape and size as the stage support rod. The plasma cleaning device is a small hollow cathode that is excited by RF power. Air or other oxygen containing mixtures is admitted to the plasma through the hollow rod at a pressure below 1 Torr. The plasma creates oxygen radicals from the oxygen containing gas. The oxygen radicals oxidize the hydrocarbons contamination and convert them to easily pumped gases. The apparatus can be attached to the electron microscope whenever cleaning is needed, and then is easily removed to return the instrument to its analytical function. |
| priorityDate |
2009-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |