http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011006581-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8ace3886ad985680695e66f92b53552 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b34bd93f26d4881fc075e32f20ceedde |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-7085 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2010-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_576fc55f668a7d3854f6fafe5c6ddacc |
| publicationDate | 2011-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2011006581-A1 |
| titleOfInvention | Illumination system for illuminating a mask in a microlithographic projection exposure apparatus |
| abstract | An illumination system for illuminating a mask in a microlithographic projection exposure apparatus comprises an array (46; 120) of mirrors or other beam deflecting elements (48). Each beam deflecting element (48) produces on the surface a projection light spot (73a, 73b) at a position that is variable by changing a deflection angle produced by the beam deflecting element (48). A spot shape measuring unit (106) measures the shapes of spots which are produced on the spot measuring unit (106) by the beam deflecting elements (48). The spot shape measuring unit (106) is arranged outside of every possible path projection light is allowed to take between the array (46; 120) and the mask (16). A control unit (50) controls the beam deflecting elements (48) such that, at a given instant during an exposure operation of the apparatus (10), at least one beam deflecting element (48) directs projection light exclusively on the spot shape measuring unit (106), and at least some beam deflecting elements (48) direct projection light exclusively on the surface (71). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015512156-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10146134-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103091990-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017530398-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101938723-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103091990-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I575338-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106716256-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016045897-A1 |
| priorityDate | 2009-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.