http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010151337-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b1c4954a3b1bae6c63acc5f55f697116
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02592
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
filingDate 2010-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4470a098532301cf64feec8d620a8355
publicationDate 2010-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2010151337-A1
titleOfInvention Improving the adhesiveness of fluorocarbon(cfx) film by doping of amorphous carbon
abstract A method of forming an amorphous carbon layer on an insulating layer includes the step of forming an amorphous carbon layer using a plasma reaction process. The amorphous carbon layer is formed in an atmosphere containing a plasma excitation gas, a C x H y series gas, a silicon containing gas, and an oxygen-containing gas.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012212706-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101921336-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013046070-A
priorityDate 2009-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008038788-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006156984-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003127709-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005227500-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6184572-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004000534-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003012890-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009011602-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569951
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139837
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128952217
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5416
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414809770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544406
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11638
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520721
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129343924
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411556313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291

Total number of triples: 53.