| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c9bab9e9bab858b21aa815b1cbf3cb5a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_96217d9afedeb0d354fe261ef6966aef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2606235e680628a41e1762ecc29d9c3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b925d6076c6ed94554d62f568dc63a35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b36dc8af59862749344c5dd3128f7cf3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24 |
| filingDate |
2010-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba4e3608b793f362707baa66c76500f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c90ff8b68d8876f058b04db17ac2c0d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ccf539ed152a0f9b474ec8b51cccc12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d38c45d29786455da165853971ccb130
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44f20ccbdb1c65b8d208e395af4d331e |
| publicationDate |
2010-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2010139547-A1 |
| titleOfInvention |
Coating installation and coating method |
| abstract |
The invention relates to a coating installation containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device. Electric current can be supplied to the activation element via at least two contact elements and the contact elements are fastened so as to be virtually immobile relative to the recipient. The activation element is arranged so as to be mobile relative to the recipient. The invention further relates to a corresponding coating method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012114855-A1 |
| priorityDate |
2009-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |