Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_96217d9afedeb0d354fe261ef6966aef http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2606235e680628a41e1762ecc29d9c3a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c9bab9e9bab858b21aa815b1cbf3cb5a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b925d6076c6ed94554d62f568dc63a35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b36dc8af59862749344c5dd3128f7cf3 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-271 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24 |
filingDate |
2010-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d38c45d29786455da165853971ccb130 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ccf539ed152a0f9b474ec8b51cccc12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba4e3608b793f362707baa66c76500f7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44f20ccbdb1c65b8d208e395af4d331e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c90ff8b68d8876f058b04db17ac2c0d7 |
publicationDate |
2010-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2010139543-A1 |
titleOfInvention |
Coating installation and method |
abstract |
The invention relates to a coating installation containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device to be virtually immobile relative to the recipient. Electric current can be supplied to the activation element via at least two contact elements and at least one of the contact elements is designed to contact the activation element in alternating contact points. The invention further relates to a corresponding coating method. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8986452-B2 |
priorityDate |
2009-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |