| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_39a91066003fc5d409afba39b370815f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_91a3f559b44ec9f80362da830ac746a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e555cb9bf56c79f496fbaf68c79979a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_43a9702dc5b38909edf1044c114943d8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0352
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2010-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa05bc8e2b39bcd76bfec6393c59e419
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6b271fc457a55ac0a8bedd78a8dd1a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f50fa6f7ef85a85ffaa3ce5ef063c1bf |
| publicationDate |
2010-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2010135309-A1 |
| titleOfInvention |
Methods and apparatus for aligning a set of patterns on a silicon substrate |
| abstract |
A method of aligning a set of patterns on a substrate, the substrate including a substrate surface depositing a set of silicon nanoparticles on the substrate surface, the set of nanoparticles including a set of ligand molecules including a set of carbon atoms, wherein a first set of regions is formed where the silicon nanoparticles are deposited and the remaining portions of the substrate surface define a second set of regions The method also includes densifying the set of silicon nanoparticles into a thin film wherein a set of silicon-organic zones are formed on the substrate surface, wherein the first set of regions has a first reflectivity value and the second set of regions has a second reflectivity value The method further includes illuminating the substrate surface with an illumination source, wherein the ratio of the second reflectivity value to the first reflectivity value is greater than about 1.1. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014509076-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011151305-A |
| priorityDate |
2009-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |