http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010123698-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f453717e4683b85c02a78da9eae38ff http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88f6119845609835b613468307fb4a5a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c23041aea07e8838f8ca575e64cca1db |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-774 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-1731 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01D5-35303 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01D5-35316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-02076 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01M99-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01D5-35354 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01M11-3145 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-34 |
| filingDate | 2010-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a69cf81badca3f08ec5971c42f28b02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d0abbe15a5f0f395ae13fd6ada11acc |
| publicationDate | 2010-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2010123698-A1 |
| titleOfInvention | Method and apparatus for characterizing a multilayered structure |
| abstract | An apparatus and method for characterizing the complex coupling coefficient of a multilayered periodic structure either during or after inscription is described. This apparatus is capable of continuously measuring the complex reflectivity at single or multiple wavelengths to a resolution limited by Rayleigh scattering in the waveguide section where the structure is inscribed. The apparatus is also capable of rejecting undesired signals associated with stray reflections in the system and unwanted environmentally induced change in optical path lengths during the inscription procedure. The complex coupling coefficient of the multilayered periodic structure can be derived from the measured complex reflectivity and can reveal errors present in the structure. The complex coupling coefficient can also be used to derive an error signal to enable implementation of a closed loop inscription system capable of inscribing error free multilayer structures. |
| priorityDate | 2009-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.