abstract |
There are provided a gyroscope using surface acoustic waves (SAWs) and a method of measuring angular velocity, more particularly, an SAWbased micro gyroscope capable of measuring low angular velocity and having high impactresistance and high mobility and a method of measuring angular velocity using the same. Since the gyroscope using SAW may measure at low angular velocity, does not need a structure, and may be easily manufactured by twodimensional plane processing technology, it is possible to realize a micro size, high impactresistance, high mobility, and mass production. |