| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36d486fade55ac9c1caa66998af877c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_54569ae6924e6b39e0648a2bbdfb8338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b1e05973963587e867e46607e1c1537
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9b6d8b1909352267377d8a6acdb9640b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1fc1cb872bef5c424373724094dd0242 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-84 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95607
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y35-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 |
| filingDate |
2009-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db6bdef1f1aa079d4cd0c25c0932bda8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d663099497b79abc7d4f53141828ccf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54adae6f525383c0df532ffa963e79f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d594b11aae1a822c466aac63c6d78f61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddbee16bd3056116865916fd93cffd53 |
| publicationDate |
2010-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2010098000-A1 |
| titleOfInvention |
Device for examining pattern on surface of substrate and method for examining pattern |
| abstract |
A device for examining a pattern on a surface of a substrate enables high-speed examination of the substrate including the pattern finer than the resolution limit of light. The device comprises a near-field optical head (101) having a fine repetitive pattern, a ? driving unit (311) for relatively scanning the near-field optical head (101) and a substrate (900) to be examined with each other, a gap retaining mechanism for invariably retaining the gap between the near-field optical head (101) and the substrate (900) to be examined, a light source (110) for irradiating the near-field optical head (101) with light, a detecting system (201) for detecting the intensity of scattered light produced by the interaction between the fine repetitive pattern on the near-field optical head (101) and the fine pattern on the surface of the substrate (900) to be examined, and a signal processing unit (321) for examining the fine pattern on the substrate (900) to be examined according to the output of the detecting system (201). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11287375-B2 |
| priorityDate |
2009-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |