| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ddbf66adb30c2c2de5a790d67c75e3b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c852d7a0e47e626b0296e83ae9782b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3caae0695f56cce4e53cf8deed2ba39a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q80-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-06 |
| filingDate |
2010-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c86fa40c26320a8f5d9730926768dc1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b9cba331b27a10f3476a47d2516e17e |
| publicationDate |
2010-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2010085768-A1 |
| titleOfInvention |
Large area, homogeneous array fabbrication including leveling with use of bright spots |
| abstract |
Better leveling procedures for patterning at the small scale including the nanoscale. A method comprising: providing at least one array of cantilevers comprising tips thereon, wherein the cantilevers comprise at least one relatively bright spot, or at least two relatively bright spots, near the tip upon viewing, providing a substrate, leveling the array and the substrate with respect to each other, wherein the relatively bright spot near the tip is viewed to determine a contact of the tip and substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013067395-A3 |
| priorityDate |
2009-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |