| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_18e7055575cceacdf81bb7c1956211b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98e8cb9cb38fd5efe9b0208a9b9822ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb6285096fec1893fb884495c9b3473a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5cc0cbf18909c0db83b7cdbbc901bd0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5a7c7f74e809176eb6c19596b6f16983
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d612222bfc91f4a3763d3d288ce7e0af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_68f68ac9170ba3dfd0025c1fb98be43f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1d9347bdc6af60dabeb0fd7e531aa5e9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-887 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88 |
| filingDate |
2010-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c330a3ff6b55822bc53b9ed4c4dae3db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f309327cc3fce4184477f53d48da5b5a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_969675a3be3898b182369e65e6d7bed7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98fb4961e9073627356790a5cc4fa377
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdd74c4b4e9a6fed3f94f024163f5f82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5898b19e1e606f03a9719d4f9592d81b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff8e16b46f1fe68dc9075c9ddb6e9c8a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77c1231fe37a739797ee393ec60fe2b6 |
| publicationDate |
2010-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2010085679-A2 |
| titleOfInvention |
Systems and methods for detecting defects on a wafer |
| abstract |
Systems and methods for detecting defects on a wafer are provided. One method includes generating output for a wafer by scanning the wafer with an inspection system using first and second optical states of the inspection system. The first and second optical states are defined by different values for at least one optical parameter of the inspection system. The method also includes generating first image data for the wafer using the output generated using the first optical state and second image data for the wafer using the output generated using the second optical state. In addition, the method includes combining the first image data and the second image data corresponding to substantially the same locations on the wafer thereby creating additional image data for the wafer. The method further includes detecting defects on the wafer using the additional image data. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10488348-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109916906-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107064167-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107064167-B |
| priorityDate |
2009-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |