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publicationDate 2010-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2010084759-A1
titleOfInvention Surface treatment for a fluorocarbon film
abstract A method for manufacturing semiconductor devices includes the steps of annealing an insulating layer and forming a barrier layer including a metal element over the insulating layer. The insulating layer includes a fluorocarbon (CFx) film. The barrier layer is formed by a high-temperature sputtering process after the annealing step.
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