| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc47b5b40880b8a953c1edb42d3912aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c46e6299751a8a1c1f8874210d8b1625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fe6a3b6543e46eade2e48253a48b96e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G51-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-285 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
| filingDate |
2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21146de5e02d84daa9985c35361e8bb2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7d81f2c11f8992582f2104128d00385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91a0711ab3dc4e6a989c91fdd55d6d9f |
| publicationDate |
2010-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2010061955-A1 |
| titleOfInvention |
Container containing cobalt carbonyl complex and cobalt carbonyl complex composition |
| abstract |
Disclosed is a container containing a cobalt carbonyl complex, wherein a cobalt carbonyl complex and a gas that contains carbon monoxide are contained. Also disclosed is a cobalt carbonyl complex composition containing a cobalt carbonyl complex and a solvent, wherein the concentration of carbon monoxide dissolved in the solvent is 0.001-1% by weight. The cobalt carbonyl complex contained in the container or the composition can maintain the sublimation properties thereof for a long time without being converted into a stable complex. Consequently, when a cobalt film is formed by chemical vapor deposition using the cobalt carbonyl complex, a good cobalt film can be formed by simple processes. In addition, the production cost of the cobalt film can be suppressed due to high utilization efficiency of the precursor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012172250-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012175073-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012172252-A |
| priorityDate |
2008-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |