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filingDate 2009-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12b4ffc7a204d72acf45794272ea1c89
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publicationDate 2010-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2010056294-A2
titleOfInvention Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas
abstract Embodiments of the invention relate to component structures which are useful as apparatus in plasma processing chambers. Portions of the component structures are bonded together using oxyfluoride-comprising glazes, glass ceramics, and combinations thereof. The bonding material is resistant to halogen-containing plasmas and exhibits desirable mechanical properties.
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