abstract |
An aimed alkoxycarbonylfluoroalkanesulfonic acid salt is obtained by using a halofluoroalkanoic acid ester as a starting raw material, and by sulfinating the ester in the presence of an amine (step 1) and then oxidizing the resulting product (step 2). By salt exchanging the thus-obtained alkoxycarbonylfluoroalkanesulfonic acid salt (step 3), there can be obtained an alkoxycarbonylfluoroalkanesulfonic acid onium salt which is useful as a photoacid generator. |