http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010050342-A1

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filingDate 2009-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74cd161f22e117b67788d2c7025e036b
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publicationDate 2010-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2010050342-A1
titleOfInvention Method and system for purifying nitrogen trifluoride containing halogen or halogen compound as impurity
abstract A method for purifying nitrogen trifluoride containing a halogen or a halogen compound as an impurity, which comprises a step wherein the nitrogen trifluoride is brought into contact with water, a step wherein the nitrogen trifluoride is brought into contact with an aqueous base solution, and a step wherein the nitrogen trifluoride is brought into contact with an aqueous solution of a reducing agent.  By this method, impurities can be removed while suppressing production of halogen oxides, and nitrogen trifluoride can be purified with high purity at low cost.
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