| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_22fd64a8ae1c338a03570e64e0a57982 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2009-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e7d8e63ee774bb722975007da20f265 |
| publicationDate |
2010-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2010021347-A1 |
| titleOfInvention |
Material for forming resist-sensitizing film and method for manufacturing semiconductor device |
| abstract |
Disclosed is a material for forming a resist-sensitizing film, which is capable of forming a resist-sensitizing film that can improve the sensitivity of an electron beam resist without deteriorating the resolution of the electron beam resist. Also disclosed is a method for manufacturing a semiconductor device using the material for forming a resist-sensitizing film.nThe material for forming a resist-sensitizing film contains a metal salt, a resin and a solvent. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013022081-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013025211-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013040993-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017057288-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9152052-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017057288-A1 |
| priorityDate |
2008-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |