| abstract |
Ions can be analyzed with accuracy and high sensitivity. A first electrode (11) is provided on the outer periphery of a dielectric cylindrical body (13), and a second electrode (12) is disposed in the cylindrical body (13) with a gap from the inner surface of the cylindrical body (13). When an alternating-current high voltage is applied between the first electrode (11) and the second electrode (12), a barrier discharge is generated in the cylindrical body (13). When a tip (12a) of the second electrode (12) projects outward from the end of the cylindrical body (13), thermal equilibrium plasma (P) with a low electron temperature is generated outside the end of the cylindrical body (13) without a plasma jet generated by the barrier discharge coming out from the end of the cylindrical body (13). By exposing a sample (S) to the thermal equilibrium plasma (P), particles (atoms, molecules) separated from the sample (S) are softly ionized without being decomposed and polymerized. Generated ions are introduced into a mass spectroscope (50). |