http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009145984-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c2224d49c839724e5d3ed96107ead700 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_04b3f33cdc4e338da176da7426607d54 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate | 2009-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dccc337e3f6e9b96d8bb895b760019e7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c66647c1bc6e033633b14b4b293dc9c |
| publicationDate | 2009-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2009145984-A1 |
| titleOfInvention | Post-contact opening etchants for post-contact etch cleans and methods for fabricating the same |
| abstract | Post-contact opening etchants for post-etch cleans and methods for fabricating such etchants are provided. In an exemplary embodiment, a post-contact opening etchant comprises anhydrous hydrogen fluoride and a fluoride-dissociation modulating agent. In another embodiment, a method for fabricating a post-contact opening etchant comprises providing anhydrous hydrogen fluoride, combining the anhydrous hydrogen fluoride and a fluoride-dissociation modulating agent, and mixing the anhydrous hydrogen fluoride and the fluoride-dissociation modulating agent to form a homogeneous mixture. |
| priorityDate | 2008-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 143.